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Coating equipment brief introduction

Jan 09, 2017

Vacuum coating equipment which need to be carried out under high vacuum coating, including many species, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD of laser sputter deposition in many ways. Main idea is divided into two evaporation and sputtering.

Need coating known as substrate, coating materials are becoming targets. Substrate with targets in a vacuum chamber.

Evaporation coating is generally heated target surfaces of components as an atomic or ionic form being evaporated and settlement on the substrate surface, through the film (scatter-structure-structure of aberrant Island-layers) form a thin film. Sputter coated film, can be simply understood as the use of electronic or laser bombardment targets, and surfaces of components in the form of atoms or ions are sputtering out, and eventually deposited on the substrate, through film

Process, resulting in films.